The challenge:
Protecting yield in high-stakes environments
In advanced semiconductor fabs, there is no margin for error. A single particle imperfection can reduce chip value by 70% or more. Especially as nodes shrink and tolerances tighten, materials must meet uncompromising standards of cleanliness and consistency. From CMP to ALD, alumina ultra-high purity isn’t just important, it’s decisive.
How we help:
One ultra-clean solution for CMP, ALD, and beyond
PUREGuard™ is the benchmark for ultra-high-purity alumina. Produced with 5N (99.999%) purity and engineered at the submicron scale, it delivers the cleanliness, control, and reliability needed for today’s most advanced semiconductor processes. Whether you're polishing wafers, insulating structures, or laying down atomic layers, PUREGuard™ ensures every particle performs. No fillers. No shortcuts. Just elite-grade alumina for fabs that can’t compromise.
Built to perform. Proven to protect.
PUREGuard™ powders are produced using a high-yield, lean manufacturing process. That means fewer steps, tighter control, and lower emissions—without compromising on quality. In CMP and ALD applications, our powders minimize contamination risk and support uniform results at scale. Manufactured using ISO9001:2015 certified processes with full traceability, they’re built to meet the needs of high-performance fabs.
Purity You Can Count On
PUREGuard™ delivers 99.999% Al₂O₃ purity manufactured using ISO 9001:2015 certified processes. It's made to reduce contamination risk and ensure consistent results in high-sensitivity semiconductor processes like CMP and ALD.
Cleaner process, smaller footprint
Our streamlined production process minimizes energy use, reduces emissions, and cuts waste without compromising performance.
PUREGuard™ Performance Highlights
| Purity | Up to 99.999% Al₂O₃ |
| Formats | Powder |
| Applications | Etch tools, deposition systems, CMP slurries, backend packaging |
| Particle sizes | From 0.3 µm to 2.0 µm |
The processes we protect
Our PUREGuard™ ultra-high-purity alumina supports critical performance across advanced ceramics, backend chip packaging, and thermal coating applications. Customers use PUREGuard™ to produce insulators, spacers, thermal interface materials, and protective coatings in semiconductor and industrial systems.
Backend Packaging
Used in high-reliability ceramic components for chip insulation and thermal stability.
Chemical Mechanical Polishing (CMP)
Supports slurry systems and pad formulations for defect-sensitive planarization.
Coatings
Engineered for high-performance coatings that require ultra-clean alumina with consistent thermal properties.
Ceramic Components
Enables precision-formed ceramics where ultra-high purity and sintering behavior are critical to performance.
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